External circulation on-line heating filter type pressure sensor silicon cup corrosion device

The utility model relates to the technical field of silicon piezoresistive pressure sensor wafer anisotropic corrosion preparation, and discloses an external circulation on-line heating filtering type pressure sensor silicon cup corrosion device which comprises a shell, the top of the shell is fixed...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	XIA FEI, LI FEI, BAI YANG, CHENG ZUJIE, ZHOU TAO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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