External circulation on-line heating filter type pressure sensor silicon cup corrosion device
The utility model relates to the technical field of silicon piezoresistive pressure sensor wafer anisotropic corrosion preparation, and discloses an external circulation on-line heating filtering type pressure sensor silicon cup corrosion device which comprises a shell, the top of the shell is fixed...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model relates to the technical field of silicon piezoresistive pressure sensor wafer anisotropic corrosion preparation, and discloses an external circulation on-line heating filtering type pressure sensor silicon cup corrosion device which comprises a shell, the top of the shell is fixedly connected with a corrosion container, the right side of the corrosion container is fixedly connected with a first plastic pipe, and the right side of the first plastic pipe is fixedly connected with a second plastic pipe. The other end of the first plastic pipe is fixedly connected with a corrosion-resistant instant electric heater, the input end of the corrosion-resistant instant electric heater is fixedly connected with a first connecting pipe, and the other end of the first connecting pipe is fixedly connected with a corrosion-resistant circulating pump. According to the device disclosed by the utility model, under the cooperation of the corrosion-resistant circulating pump, the corrosion-resistant filter, th |
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