Wafer cleaning fixture

The utility model relates to the technical field of semiconductor processing, and discloses a wafer cleaning fixture, which comprises a handle, a movable clamping seat and a support, and at least two fixed clamping heads are arranged on the support at intervals; the movable clamping seat comprises a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZENG QI, LIU RUIXIONG, LIAO BIN, ZHOU TIEJUN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The utility model relates to the technical field of semiconductor processing, and discloses a wafer cleaning fixture, which comprises a handle, a movable clamping seat and a support, and at least two fixed clamping heads are arranged on the support at intervals; the movable clamping seat comprises a base body and an elastic clamping arm, concave-convex structures which are matched with each other are arranged on the inner wall, in contact with the handle, of the elastic clamping arm and the outer side wall of the handle in the width direction, and the concave-convex structures are used for stopping the movable clamping seat; the base body is further provided with a movable clamping head arranged towards the support, and a clamping space used for clamping a wafer is formed between the fixed clamping head and the movable clamping head. After a wafer is placed on the support, an operator pushes the movable clamping seat to move towards the support, the elastic clamping arms of the movable clamping seat overcome