Liquid medicine cooling equipment and concentration detection system for semiconductor production

The utility model provides liquid medicine cooling equipment and a concentration detection system for semiconductor production, the liquid medicine cooling equipment comprises a shell body and a cold medium pipe, the interior of the shell body is hollow, and the shell body is communicated with the o...

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Bibliographische Detailangaben
Hauptverfasser:	ZHANG MUXIANG, SUN CHENGUANG, WANG YANJUN, AZUMA SHIHIRO, LIU JIANWEI, TAN YONGLIN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING COLD ROOMS COMBINED HEATING AND REFRIGERATION SYSTEMS COOLING OR FREEZING APPARATUS NOT COVERED BY ANY OTHERSUBCLASS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HEAT EXCHANGE IN GENERAL HEAT PUMP SYSTEMS HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS,IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT HEATING ICE-BOXES INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES LIGHTING LIQUEFACTION SOLIDIFICATION OF GASES MANUFACTURE OR STORAGE OF ICE MEASURING MECHANICAL ENGINEERING PHYSICS REFRIGERATION MACHINES, PLANTS OR SYSTEMS REFRIGERATION OR COOLING REFRIGERATORS SEMICONDUCTOR DEVICES TESTING WEAPONS
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Beschreibung
Zusammenfassung:	The utility model provides liquid medicine cooling equipment and a concentration detection system for semiconductor production, the liquid medicine cooling equipment comprises a shell body and a cold medium pipe, the interior of the shell body is hollow, and the shell body is communicated with the outside through a medicine inlet and a medicine outlet which are arranged on the shell body; the cold medium pipe is arranged in the shell body and comprises a plurality of capillary pipes, the two ends of the capillary pipes extend out of the shell body, and the capillary pipes serve as an input port and an output port of a cold medium respectively; the cold medium is used for cooling the liquid medicine in the shell body; the liquid medicine concentration detection system comprises cold source equipment, detection equipment and the cooling equipment. According to the utility model, the liquid medicine is cooled and then the concentration is detected, so that the impact of the high-temperature liquid medicine on st