Wafer detecting and sorting system
The utility model discloses a wafer detecting and sorting system which comprises a wafer storage device, a mechanical arm, a transfer disc, a detecting device and a wafer classified storage device which are arranged on a sorting table. The mechanical arm is located in the middle of the sorting table...
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| creator | XIE XINMEI LIU MINGZHANG |
| description | The utility model discloses a wafer detecting and sorting system which comprises a wafer storage device, a mechanical arm, a transfer disc, a detecting device and a wafer classified storage device which are arranged on a sorting table. The mechanical arm is located in the middle of the sorting table, the transfer disc is connected with the free end of the mechanical arm, a plurality of air cavities are formed in the transfer disc, wafers are used for being suspended at the tops of the air cavities, air film layers are formed between the wafers and the air cavities, and the detection device detects and classifies the wafers through a visual recognition method. The detection device and the wafer classified storage device are located on the two sides of the mechanical arm respectively, the mechanical arm drives the transfer disc to move synchronously, wafers are suspended on the transfer disc in a contact mode, the problem that the wafers are accidentally damaged in the moving process is solved, and meanwhile th |
| format | Patent |
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The mechanical arm is located in the middle of the sorting table, the transfer disc is connected with the free end of the mechanical arm, a plurality of air cavities are formed in the transfer disc, wafers are used for being suspended at the tops of the air cavities, air film layers are formed between the wafers and the air cavities, and the detection device detects and classifies the wafers through a visual recognition method. 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| language | chi ; eng |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS POSTAL SORTING SEMICONDUCTOR DEVICES SEPARATING SOLIDS FROM SOLIDS SORTING SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTEDPIECE-MEAL, e.g. BY PICKING TRANSPORTING |
| title | Wafer detecting and sorting system |
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