Wafer detecting and sorting system

The utility model discloses a wafer detecting and sorting system which comprises a wafer storage device, a mechanical arm, a transfer disc, a detecting device and a wafer classified storage device which are arranged on a sorting table. The mechanical arm is located in the middle of the sorting table...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: XIE XINMEI, LIU MINGZHANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model discloses a wafer detecting and sorting system which comprises a wafer storage device, a mechanical arm, a transfer disc, a detecting device and a wafer classified storage device which are arranged on a sorting table. The mechanical arm is located in the middle of the sorting table, the transfer disc is connected with the free end of the mechanical arm, a plurality of air cavities are formed in the transfer disc, wafers are used for being suspended at the tops of the air cavities, air film layers are formed between the wafers and the air cavities, and the detection device detects and classifies the wafers through a visual recognition method. The detection device and the wafer classified storage device are located on the two sides of the mechanical arm respectively, the mechanical arm drives the transfer disc to move synchronously, wafers are suspended on the transfer disc in a contact mode, the problem that the wafers are accidentally damaged in the moving process is solved, and meanwhile th