Protective device applied to turbo molecular pump

The utility model relates to the technical field of molecular pump protection, and discloses a protective device applied to a turbo molecular pump, which comprises a plurality of limiting mechanisms uniformly distributed on the outer side of the turbo molecular pump, the limiting mechanism comprises...

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Bibliographische Detailangaben
Hauptverfasser: WANG GUIYI, WANG ZHENQIONG, DIAO LICHEN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model relates to the technical field of molecular pump protection, and discloses a protective device applied to a turbo molecular pump, which comprises a plurality of limiting mechanisms uniformly distributed on the outer side of the turbo molecular pump, the limiting mechanism comprises an L-shaped frame, the L-shaped frame is connected with a supporting table of the turbo molecular pump through bolts, one side of the L-shaped frame is connected with an arc-shaped frame, the outer side of the L-shaped frame is connected with a connecting strip, and one side of the connecting strip is connected with a rubber strip. Compared with the prior art, the device has the advantages that the rubber strip has certain deformability, the rubber strip can be fixed on the outer side of the molecular pump in an auxiliary mode through meshing limiting of the threaded sleeve and the threaded rod, and compared with the prior art, the device can conduct auxiliary limiting on the outer side of the molecular pump, mean