Intelligent storage of photomask cartridges for storing semiconductor wafers

According to the intelligent warehouse of the photomask boxes for storing the semiconductor wafers, the photomask boxes are placed in the photomask box transferring and circulating device to be transferred in a circulating mode, automatic circulating feeding and discharging of the photomask boxes are achieved, the use efficiency and safety of the photomask boxes are improved, and low efficiency and risks of manual carrying and warehouse management are avoided. A feeding and discharging port in butt joint with a bin door of the storage body is formed in the side face of a shell of the transferring and circulating device, and a second mounting plate of the photomask box taking device can take out the photomask boxes from the jigs and send the photomask boxes into the storage body through the feeding and discharging port in a negative pressure suction mode or put the photomask boxes into the jigs from the storage body. According to the photomask box taking mechanism, the rotating mechanism and the negative press