Mechanical arm for taking and placing wafer

The embodiment of the utility model discloses a mechanical arm for taking and placing a wafer. The mechanical arm comprises a plurality of sections, a plurality of clamping parts and a plurality of clamping parts, the at least one elastic connecting piece is used for correspondingly connecting at least one group of sections in the plurality of sections, and each group of sections consists of two adjacent sections, so that when one of the two sections connected by the elastic connecting piece is subjected to external force, the elastic connecting piece is connected with the at least one group of sections; and the elastic restoring force of the elastic connecting piece can be overcome, and the position of the elastic connecting piece can be changed relative to the other section. 本实用新型实施例公开了一种用于取放晶圆的机械手臂，所述机械手臂包括：多个节段；至少一个弹性连接件，所述至少一个弹性连接件用于相应地连接所述多个节段中的至少一组节段，其中，每组节段由相邻的两个节段组成，使得被所述弹性连接件连接的两个节段中的一者受到外力作用时，能够克服所述弹性连接件的弹性回复力相对于所述两个节段中的另一者产生位置的改变。