Silicon crystal bar cutting fluid supply system and silicon crystal bar cutting system

The utility model discloses a silicon crystal bar cutting fluid supply system which is characterized by comprising a supply pump, a cutting fluid supply device and a cutting fluid supply device, the distribution pipe is provided with a feeding end and a discharging end, and the feeding end is commun...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: JIAN LIMIN, HU TIANCHANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model discloses a silicon crystal bar cutting fluid supply system which is characterized by comprising a supply pump, a cutting fluid supply device and a cutting fluid supply device, the distribution pipe is provided with a feeding end and a discharging end, and the feeding end is communicated with the supply pump; and the cutting fluid supply device comprises a silicon crystal bar cutting fluid storage device, a diluting device connected to the silicon crystal bar cutting fluid storage device, a mixing device connected with the diluting device, and an output pipe connected with the mixing device and the supply pump. According to the utility model, the reject ratio of silicon crystal bar cutting is reduced, and the cost of the manufacturing process is reduced. 本实用新型公开一种硅晶棒切削液供应系统,其特征在于,包含:供给泵;配送管,具有进料端及出料端,该进料端连通该供给泵;切削液供应装置,其包含:硅晶棒切削液储存装置、连接于该硅晶棒切削液储存装置的稀释装置、连接该稀释装置的混合装置以及连接该混合装置与该供给泵的输出管。本实用新型解决了硅晶棒切削的不良率,并减少了制程的成本。