Multi-airfoil rotor molecular pump for instrument

The utility model provides a multi-wing rotor molecular pump for an instrument. The multi-wing rotor molecular pump for the instrument comprises a rotor assembly, a pump shell, an internal and external spiral level structure, an internal spiral level structure and a stator assembly. The internal and...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: JING JIARONG, HUANG TAO, ZHANG YANSHUN, CHEN YANLONG, CHEN QI, NING YUANTAO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model provides a multi-wing rotor molecular pump for an instrument. The multi-wing rotor molecular pump for the instrument comprises a rotor assembly, a pump shell, an internal and external spiral level structure, an internal spiral level structure and a stator assembly. The internal and external spiral stage structure is arranged on the pump shell, and the internal spiral stage structure is arranged in the internal and external spiral stage structure; the rotor assembly and the stator assembly are arranged in the internal and external spiral stage structure; an air inlet is formed in the pump shell, and the rotor assembly extracts air through the air inlet; the internal and external spiral level structure and the internal spiral level structure are both provided with air outlet holes, the internal and external spiral level structure is provided with an exhaust port, and the exhaust port is communicated with the air outlet holes. According to the molecular pump, the small-gap structural design is