Semiconductor production detection device
The utility model discloses a semiconductor production detection device, which belongs to the technical field of semiconductor detection, and comprises a base, a first clamping assembly, a second clamping assembly, a rotating assembly and a jacking assembly, a barrel body is arranged at the bottom o...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model discloses a semiconductor production detection device, which belongs to the technical field of semiconductor detection, and comprises a base, a first clamping assembly, a second clamping assembly, a rotating assembly and a jacking assembly, a barrel body is arranged at the bottom of the central position in a detection bin, the overlook cross section of the barrel body is circular, and the rotating assembly is arranged at the circle center position of the barrel body. The rotating assembly is in driving connection with a linear rail, the linear rail is in driving connection with a linear motor, the jacking assembly is arranged on the linear motor and is in driving connection with a jacking plate, and under the action of the rotating assembly, the linear rail and the linear motor are matched, so that the position of the jacking plate can be adjusted; according to the invention, the jacking plate can move to different corresponding positions on the semiconductor plate according to detection req |
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