Detachable inner cavity structure for parylene pyrolysis CVD (Chemical Vapor Deposition)

The utility model discloses a parylene pyrolysis CVD (Chemical Vapor Deposition) detachable inner cavity structure which comprises a cavity, an inner cavity assembly which can be taken out and detached is placed in the cavity, a feeding pipeline and a discharging pipeline which are communicated with the inner cavity assembly are further inserted in the cavity, and a cover plate assembly which can be opened and closed is arranged at the top of the cavity; the inner cavity assembly comprises a lower cavity and an upper cavity which are connected in a sealed mode. According to the mode, the small cavity can be rapidly filled with coating materials in a short time, the coating quality is good, the inner cavity assembly can be taken down and detached, cleaning is convenient, the problems that a cavity film layer is left and difficult to clean thoroughly are solved, replacement is convenient, and the coating rhythm is not affected. 本实用新型公开了一种parylene热解CVD的可拆卸内腔结构，包括腔体，所述腔体放置有能够取出以及拆卸的内腔组件，所述腔体上还插装有与内腔组件相通的进料管道以及出料管