Quartz crucible cleaning device

The quartz crucible cleaning device comprises a bearing table, an outer wall cleaning mechanism arranged above the bearing table and an inner wall cleaning mechanism arranged below the bearing table, the inner wall cleaning mechanism comprises a lifting assembly, a first rotating assembly and an inn...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WANG JIAN, HU SHIDE, YANG YUNXIANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The quartz crucible cleaning device comprises a bearing table, an outer wall cleaning mechanism arranged above the bearing table and an inner wall cleaning mechanism arranged below the bearing table, the inner wall cleaning mechanism comprises a lifting assembly, a first rotating assembly and an inner cleaning pipe, and the lifting end of the lifting assembly is connected with the rotating assembly; by the adoption of the technical scheme, a quartz crucible to be cleaned is aligned with the annular positioning groove to be reversely buckled on the bearing table, the inner cleaning pipe is driven by the lifting assembly to move upwards to enter the inner wall of the quartz crucible, a pickling solution is sprayed to the inner wall of the quartz crucible through the inner cleaning pipe, and then the quartz crucible is cleaned. And meanwhile, the outer wall cleaning mechanism carries out acid pickling on the outer wall of the quartz crucible, acid pickling can be carried out on the inner wall and the outer wall