Recovery device and semiconductor process equipment

The utility model provides a recovery device and semiconductor process equipment. The recovery device comprises a recovery cup and a connecting pipe; a recycling hole channel and a mounting groove are formed in the bottom of the recycling cup; one end of the connecting pipe is inserted into the moun...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	XU LU, WANG CHU, LONG ZHIZHUO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
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