Recovery device and semiconductor process equipment

The utility model provides a recovery device and semiconductor process equipment. The recovery device comprises a recovery cup and a connecting pipe; a recycling hole channel and a mounting groove are formed in the bottom of the recycling cup; one end of the connecting pipe is inserted into the mounting groove to be fixed with the recycling cup, and a pipe cavity of the connecting pipe is communicated with the recycling hole channel; on a combination surface formed by the contact of the recovery hole channel and the pipe cavity, the orthographic projection of the recovery hole channel falls into the orthographic projection of the pipe cavity. According to the application, the phenomena of liquid medicine accumulation and reverse osmosis can be avoided, and the structural strength and the connection reliability of the joint of the recovery cup and the connecting pipe can be improved. 本申请提出了一种回收装置及半导体工艺设备。该回收装置包括回收杯及连管；回收杯的底部设置有回收孔道和安装槽；连管的一端插置于安装槽中以与回收杯固定、且连管的管腔与回收孔道连通；在回收孔道与管腔接触形成的结合面上，回收孔道的正投影落入管腔的正投影内。本申请可以