Miniaturized anti-falling tuning fork resonator

The utility model relates to the field of semiconductors, in particular to a miniaturized anti-falling tuning fork resonator, which is characterized in that a resonator body comprises a base and two groups of vibrating arms formed by extending from the base, the two groups of vibrating arms are symm...

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Bibliographische Detailangaben
Hauptverfasser: WANG LEI, WANG XIN, DONG SHUXIA, DING YIQI, ZHA XIAOBING, LYU CHENG, XU MAODONG, LUO XIAOTIAN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model relates to the field of semiconductors, in particular to a miniaturized anti-falling tuning fork resonator, which is characterized in that a resonator body comprises a base and two groups of vibrating arms formed by extending from the base, the two groups of vibrating arms are symmetrically arranged relative to the central axis of the base, and the base further extends along the length direction of the vibrating arms to form two groups of dispensing arms arranged parallel to the vibrating arms. The two dispensing arms are symmetrically distributed on the two sides of the two vibrating arms, the dispensing arms extend towards the two sides in the width direction to form dispensing tables, and glue grooves with the groove width larger than that of the dispensing arms are formed in the dispensing tables. According to the utility model, the resonator can be firmly fixed. 本实用新型涉及半导体领域,具体是一种小型化抗跌落音叉谐振器,谐振器本体包括基座以及自基座上延伸形成的两组振动臂,两组振动臂关于基座中心轴对称布置,基座上沿振动臂长度方向还延伸形成两组与振动臂平行布置的点胶臂,两点胶臂对称分布在两振动臂的两侧,所述点胶臂