Miniature shielding etching bearing device
The utility model discloses a miniature shielding etching bearing device, which comprises an upper shielding assembly, a lower shielding assembly, a first positioning assembly and a second positioning assembly, wherein the upper shielding assembly and the lower shielding assembly are oppositely arra...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Online-Zugang: | Volltext bestellen |
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| Zusammenfassung: | The utility model discloses a miniature shielding etching bearing device, which comprises an upper shielding assembly, a lower shielding assembly, a first positioning assembly and a second positioning assembly, wherein the upper shielding assembly and the lower shielding assembly are oppositely arranged; the first positioning assembly is used for positioning a silicon disc; the second positioning assembly is used for positioning the upper shielding assembly and the lower shielding assembly; each of the upper shielding assembly and the lower shielding assembly comprises an annular shielding plate and an annular rubber pad clamped and fixed on the annular shielding plate, the annular rubber pads protrude out of the annular shielding plates, a silicon disc is placed on the lower shielding assembly, and the upper shielding assembly covers the silicon disc. The two annular shielding plates which are arranged up and down fix the silicon disc in the middle and shield the outer ring of the silicon disc at the same ti |
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