Liquid leakage detection alarm device and etching machine

The utility model provides a liquid leakage detection alarm device and an etching machine. The liquid leakage detection alarm device comprises a power supply, a plurality of groups of liquid leakage detection units and an alarm unit, each group of liquid leakage detection unit comprises a liquid lea...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHU HUAIHAO, YU PENGYI, PAN WUJI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model provides a liquid leakage detection alarm device and an etching machine. The liquid leakage detection alarm device comprises a power supply, a plurality of groups of liquid leakage detection units and an alarm unit, each group of liquid leakage detection unit comprises a liquid leakage detector, an electric appliance access port, a control electric appliance and a liquid leakage controller, the liquid leakage detector and the liquid leakage controller are connected in series to form a detection circuit, and the electric appliance access port and the control electric appliance are connected to the detection circuit after being connected; the liquid leakage detection units are connected in parallel and then connected with a power supply; and the alarm unit is in communication connection with the liquid leakage controller of each group of liquid leakage detection unit. According to the utility model, the plurality of groups of liquid leakage detection units are connected in parallel and then ar