Mask box detection device

The utility model provides a mask box detecting device which comprises a bearing table, the bearing table is fixedly connected with one ends of a plurality of supporting springs, the other ends of the supporting springs are fixedly connected with a pressing piece, the thickness of the pressing piece is larger than or equal to a set value, and at least one pressure sensor is arranged between the pressing piece and the bearing table. According to the utility model, the deformation probability of the pressing sheet can be effectively reduced, the occurrence of mistaken detection of the pressure sensor is avoided, and the utilization rate of a machine is improved. 本实用新型提供一种掩膜版盒子侦测装置，包括承载台，承载台上与多个支撑弹簧的一端固定连接，支撑弹簧的另一端与压片固定连接，压片的厚度大于等于设置值，压片与承载台之间设置有至少一个压力传感器。本实用新型可以有效地减少压片的变形几率，杜绝误侦测压力传感器的发生，提高机台使用率。