CVD cracking evaporation pipeline for enhancing film quality

The CVD cracking evaporation pipeline comprises a cracking pipe, a heat conduction pipe and a plurality of diffusion plates, the heat conduction pipe used for heat conduction is arranged in the cracking pipe, the diffusion plates used for flow equalization are arranged on the heat conduction pipe, parylene powder and cracked gas can pass through the diffusion plates, and the diffusion plates are arranged in the cracking pipe. A capturing mechanism for blocking particles is mounted at the conveying tail end of the cracking pipe, the capturing mechanism comprises a capturing plate rotationally erected on the inner wall of the cracking pipe and an electric actuator for driving the capturing plate to rotate, and a plurality of filtering holes allowing cracking gas to pass through are formed in the capturing plate in an array mode. According to the mode, the powder coating device is simple in structure, can prevent uncracked or over-cracked powder particles from entering a coating cavity, solves the problem that b