Silicon wafer supporting device and silicon wafer conveying equipment

The utility model discloses a silicon wafer supporting device and silicon wafer conveying equipment, the silicon wafer supporting device comprises a base and a supporting piece, the supporting piece is movably connected with the base so as to be switched between a supporting position and an avoiding position, and the supporting piece is provided with a supporting part; at the supporting position, the supporting part is located on a moving path of the silicon wafer, so that the supporting part provides supporting force towards the thickness direction of the silicon wafer for the silicon wafer; and at the avoiding position, the supporting part leaves the moving path of the silicon wafer so as to avoid the silicon wafer. The silicon wafer supporting device provided by the embodiment of the utility model has the advantages of high yield and quality of silicon wafers and the like. 本实用新型公开了一种硅片支撑装置和硅片输送设备，所述硅片支撑装置包括基座和支撑件，所述支撑件可活动地与所述基座连接，以便所述支撑件在支撑位和避让位之间切换，所述支撑件具有支撑部；在所述支撑位，所述支撑部位于硅片的移动路径上，以便所述支撑部对所述硅片提供朝向硅片厚度方向的