Single crystal furnace water cooling screen with bottom end protection
The utility model discloses a single crystal furnace water cooling screen with bottom end protection, which comprises a lower furnace barrel, a water cooling screen and a protection ring are arranged in the lower furnace barrel, the water cooling screen and the protection ring are fixed above the lo...
Gespeichert in:
Hauptverfasser: | , , , , , , , , , |
---|---|
Format: | Patent |
Sprache: | chi ; eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The utility model discloses a single crystal furnace water cooling screen with bottom end protection, which comprises a lower furnace barrel, a water cooling screen and a protection ring are arranged in the lower furnace barrel, the water cooling screen and the protection ring are fixed above the lower furnace barrel, and the lower furnace barrel is used for dissolving and storing polycrystalline silicon material melt. The protection ring is hung on the face, close to the polycrystalline silicon material melt, of the water cooling screen in a sleeving mode, an annular groove with a certain depth is formed in the protection ring, a high-heat-conductivity material is stored in the groove, the side wall of the groove extends out of a pipeline communicated to the outer wall of the lower furnace barrel, and a temperature detector is arranged at the tail end of the pipeline. The water cooling screen is provided with a fixing piece at the sleeving position, the protection ring is provided with a concave part matched |
---|