Multi-station mask temporary storage device
The utility model discloses a multi-station mask temporary storage device which comprises a plurality of mask storage mechanisms, each mask storage mechanism comprises two mask storage stations which are oppositely arranged, and a transposition mechanism is connected between the two mask storage sta...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model discloses a multi-station mask temporary storage device which comprises a plurality of mask storage mechanisms, each mask storage mechanism comprises two mask storage stations which are oppositely arranged, and a transposition mechanism is connected between the two mask storage stations which are oppositely arranged; the transposition mechanism comprises a rotating shaft, and one end of the rotating shaft is connected with a transposition driving assembly. An upper clamping plate mechanism and a lower clamping plate mechanism are arranged on the plate storage station, the upper clamping plate mechanism and the lower clamping plate mechanism are oppositely arranged, the upper clamping plate mechanism comprises an upper lifting assembly and an upper clamping assembly driven by the upper lifting assembly, and the lower clamping plate mechanism comprises a lower lifting assembly and a lower clamping assembly driven by the lower lifting assembly. The upper clamping assembly and the lower clamping |
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