Diffusion and low pressure chemical vapor deposition (LPCVD) quartz boat

The utility model relates to a diffusion and LPCVD quartz boat, which comprises two square fixing plates, a plurality of cross rods and a plurality of clamping rods, the cross rods and the clamping rods are arranged in parallel, the cross rods and the clamping rods are respectively provided with a plurality of clamping grooves for clamping silicon wafers along the axial direction, and in the working state, the cross rods and the clamping rods of the quartz boat extend along the horizontal direction, and the silicon wafers are clamped in the clamping grooves. The clamping grooves of the cross rods and the clamping grooves of the clamping rods are in one-to-one correspondence in the same vertical direction; the fixing plate is provided with a first edge and a second edge which are oppositely arranged, and a third edge located between the first edge and the second edge, the first edge and the second edge corresponding to the fixing plate are respectively provided with a cross rod, and the two opposite sides of t