Superconducting cavity plasma cleaning circuit structure

The utility model relates to the technical field of plasma cleaning of superconducting cavities, in particular to a circuit structure for plasma cleaning of a superconducting cavity. The circuit structure comprises a main circuit and a power monitoring circuit, wherein the main circuit comprises a signal source, a power amplifier, a circulator, a directional coupler, a branch tuner, a bias device, a power coupler and a superconducting cavity which are connected in sequence; the power monitoring circuit comprises a power monitoring device which is used for closely monitoring incident power and reflection power of a superconducting cavity power feed-in port and transmission power of a superconducting cavity power extraction port. On one hand, the position of the stub short circuit piece is adjusted through the stub tuner to improve the condition that the impedance of the power coupler in a weak coupling state is not matched; on the other hand, defects of an existing device are effectively overcome. 本发明涉及超导腔的等离子