Lifting mechanism and single crystal furnace rotary plate valve

The utility model relates to the technical field of single crystal furnace equipment, and provides a lifting mechanism and a single crystal furnace rotary plate valve. The valve shaft is in sliding fit with the fixed seat in the axial direction; the linear driving piece is fixedly connected to the f...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHOU GANG, WANG LIN, XIE YONGXU
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model relates to the technical field of single crystal furnace equipment, and provides a lifting mechanism and a single crystal furnace rotary plate valve. The valve shaft is in sliding fit with the fixed seat in the axial direction; the linear driving piece is fixedly connected to the fixed seat, the output end of the linear driving piece is rotationally connected with the valve shaft, and the linear driving piece is used for driving the valve shaft to move axially; the guide groove is formed in one of the fixed seat and the valve shaft; the guide part is arranged on the other one of the fixed seat and the valve shaft and is embedded in the guide groove in a sliding manner; the guide groove comprises a first groove and a second groove; the first groove extends in the axial direction of the valve shaft. The second groove is in a spiral shape and is arranged around the axis of the valve shaft, and the end of the first groove communicates with the end of the second groove. According to the arrangeme