Quartz boat, quartz boat assembly and diffusion furnace

The utility model provides a quartz boat, a quartz boat assembly and a diffusion furnace, the quartz boat comprises a gas inlet end side wall and a gas outlet end side wall, and the gas inlet end side wall and the gas outlet end side wall are provided with a plurality of gas circulation holes. According to the invention, disordered airflow formed near the side wall of the quartz boat can be reduced or avoided, the uniformity and stability of the airflow can be improved, so that the uniformity and stability of diffusion doping are improved, the length of a diffusion furnace does not need to be increased, the size of a machine table does not need to be changed, false wafers can be reduced or avoided, and the cost is reduced. Therefore, the output efficiency can be improved. 本公开提供一种石英舟、石英舟组件及扩散炉，石英舟包括进气端侧壁和出气端侧壁，进气端侧壁和出气端侧壁上设有多个气体流通孔。本公开能够减少或避免在石英舟侧壁附近形成紊乱气流，可以改善气流的均匀性及稳定性，从而提升扩散掺杂的均匀性及稳定性，并且本公开可以不用增长扩散炉长度、无需改变机台尺寸，还可以减少或避免采用假片，因而可以提升产出效率。