Lamp holder structure, epitaxial device and semiconductor equipment

The utility model provides a lamp holder structure, an epitaxial device and semiconductor equipment. The lamp holder structure comprises an installation part, a lamp holder, a plurality of supporting parts and a plurality of lamp sets, a part of the lamp holder is located in the installation part, a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LI BING, HENG DEZHENG, TENG YANCHAO, WU MIN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The utility model provides a lamp holder structure, an epitaxial device and semiconductor equipment. The lamp holder structure comprises an installation part, a lamp holder, a plurality of supporting parts and a plurality of lamp sets, a part of the lamp holder is located in the installation part, and the lamp holder and the installation part are arranged at intervals. A part of the lamp holder and the installation piece form an installation space, the installation space comprises a first wall face and a second wall face, and the first wall face and the second wall face are oppositely arranged. One of the first wall face and the second wall face is located on the installation piece, and the other wall face is located on a part of the lamp holder. The supporting pieces are contained in the installation space and arranged around the lamp holder, each supporting piece comprises a main body part and a rolling body, the main body parts are fixedly connected to the first wall face, and the rolling bodies are rotati