Vacuum source mechanical arm

The utility model provides a vacuum source mechanical arm which comprises a mechanical arm front fork and a pressure sensor arranged on the mechanical arm front fork, one end of the mechanical arm front fork is provided with an air hole, the other end of the mechanical arm front fork is provided with a vacuum source inlet communicated with the air hole, and the vacuum source inlet is used for being connected with a vacuumizing device. The end, provided with the air hole, of the mechanical arm front fork is further provided with an installation groove used for installing the pressure sensor, and the thickness of the pressure sensor is larger than the depth of the installation groove. The vacuum source mechanical arm solves the problem that in the prior art, when a mechanical arm does not adsorb a wafer, the mechanical arm still carries out wafer taking and placing operation, and the wafer taking and placing production process is abnormal. 本实用新型提供一种真空源机械臂，该真空源机械臂包括机械臂前叉和设置在所述机械臂前叉上的压力传感器，所述机械臂前叉一端设有气孔，另一端设有与所述气