Plasma cleaning module

The utility model relates to the field of plasma etching, and discloses a plasma cleaning module, which comprises two gas exhaust components and at least two electrode plates, the plurality of electrode plates are sequentially arranged at intervals along one direction, a gap is arranged between two...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WANG JUNFENG, LI HUI, DENG JINBIAO, PENG ZIYANG, YE RONGKANG, FENG RUIQING, ZHOU MIN, LIU MOUMIAO, LI ZHIYUE, XIE WENBIAO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS PRINTED CIRCUITS
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