PVD (Physical Vapor Deposition) coating equipment

The utility model provides PVD (Physical Vapor Deposition) coating equipment which comprises a feeding cavity, a first process cavity, a second process cavity and a discharging cavity, an isolating cavity is arranged between the first process cavity and the second process cavity, and isolating valves are respectively arranged at two ends of the isolating cavity, which are connected with the first process cavity and the second process cavity; when the first process cavity or the second process cavity needs to be subjected to vacuum breaking, vacuum breaking can be independently carried out, vacuum breaking of all the cavities is not needed, the equipment maintenance time is shortened, and the equipment utilization rate is increased. 本实用新型提供一种PVD镀膜设备，包括入料腔、第一工艺腔、第二工艺腔室和出料腔，所述第一工艺腔和第二工艺腔之间设有隔离腔，所述隔离腔与所述第一工艺腔和第二工艺腔相连的两端分别设有隔离阀；当第一工艺腔或第二工艺腔需要破真空时，可以独立破真空无需所有腔室全部破真空，降低设备维护保养维护时间，提高设备利用率。