Ejector pin for preventing wafer from sliding
The utility model relates to an ejector pin for preventing a wafer from sliding. The ejector pin comprises a pin seat; the needle head is arranged at one end of the needle seat, and the needle head is made of an ethylene propylene diene monomer material; when a plurality of ejector pins are used for...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model relates to an ejector pin for preventing a wafer from sliding. The ejector pin comprises a pin seat; the needle head is arranged at one end of the needle seat, and the needle head is made of an ethylene propylene diene monomer material; when a plurality of ejector pins are used for abutting against a wafer, compared with an ejector pin in the prior art, the contact area between the pin head and the wafer can be increased, and the friction force between the pin head and the wafer can be improved due to the fact that the pin head is made of ethylene propylene diene monomer rubber and has the characteristic of high friction coefficient. Scratching caused by the phenomenon that the wafer slides relative to the needle head in the rotating process is prevented, and the effect of improving the yield of the wafer is achieved.
本实用新型为一种防止晶圆滑动的顶针,其包含一针座;一针头,其设置于针座的一端,针头为三元乙丙橡胶材质;当多个本实用新型用于抵顶一晶圆时,相较于现有技术的顶针,本实用新型的针头除了可增加与晶圆的接触面积外,因为针头具有三元乙丙橡胶材质,其具有高摩擦系数的特性,更可提升针头与晶圆之间的摩擦力,防止晶圆于转动的过程中与针头彼此产生滑移的现象而导致刮伤,具有 |
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