Automatic cooling oxygen-free oven
The utility model discloses an automatic cooling oxygen-free oven, which comprises a heating mechanism, a detection mechanism, a control mechanism and a cooling mechanism, the heating mechanism, the detection mechanism, the control mechanism and the cooling mechanism are sequentially in communicatio...
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| Hauptverfasser: | , , , , |
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The utility model discloses an automatic cooling oxygen-free oven, which comprises a heating mechanism, a detection mechanism, a control mechanism and a cooling mechanism, the heating mechanism, the detection mechanism, the control mechanism and the cooling mechanism are sequentially in communication connection, the heating mechanism is used for heating a wafer, the detection mechanism is used for monitoring the temperature of the oxygen-free oven in real time and sending information to a control module, and the control module is used for controlling the control mechanism to control the cooling mechanism. The control module controls closing of the heating mechanism and starting and closing of the cooling mechanism. The detection mechanism is provided with the first threshold value and the second threshold value, information can be sent when the detection mechanism detects that the temperature of the oxygen-free oven reaches the first threshold value or the second threshold value, the control mechanism control |
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