Combined monocrystalline silicon differential pressure sensor

The utility model relates to the technical field of differential pressure sensors, and discloses a combined monocrystalline silicon differential pressure sensor. Comprising a sensor shell, a sensor positive pressure cavity arranged on one side of the sensor shell, a sensor negative pressure cavity a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CAO XINFEN, DU YONGCHUN, ZANG XINGJIE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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