Combined monocrystalline silicon differential pressure sensor
The utility model relates to the technical field of differential pressure sensors, and discloses a combined monocrystalline silicon differential pressure sensor. Comprising a sensor shell, a sensor positive pressure cavity arranged on one side of the sensor shell, a sensor negative pressure cavity a...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model relates to the technical field of differential pressure sensors, and discloses a combined monocrystalline silicon differential pressure sensor. Comprising a sensor shell, a sensor positive pressure cavity arranged on one side of the sensor shell, a sensor negative pressure cavity arranged on the other side of the sensor shell, a monocrystalline silicon sensor chip arranged in a cavity of the sensor shell, an oil guide pipeline I connected with the upper part of the monocrystalline silicon sensor chip, and an oil guide pipeline II connected with the lower part of the monocrystalline silicon sensor chip, the ends, away from the monocrystalline silicon sensor chip, of the first oil guide pipeline and the second oil guide pipeline are connected with the sensor positive pressure cavity and the sensor negative pressure cavity respectively. When silicone oil is conveyed in the first oil guide pipeline and the second oil guide pipeline and reaches the buffering groove, impact force can act on the bu |
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