Simple MOCVD (Metal Organic Chemical Vapor Deposition) in-situ measurement device

The utility model discloses a simple MOCVD (Metal Organic Chemical Vapor Deposition) in-situ measurement device, which comprises a reaction chamber, the graphite support is arranged in the reaction chamber, and an epitaxial wafer is arranged on the graphite support; the two lifting platforms are sym...

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Bibliographische Detailangaben
Hauptverfasser:	LI YAOZE, LUO DEKUN, JIANG RUKAI, SUN WENHONG, LI LEI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR CHEMISTRY CRYSTAL GROWTH MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS METALLURGY PHYSICS PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH TESTING UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	The utility model discloses a simple MOCVD (Metal Organic Chemical Vapor Deposition) in-situ measurement device, which comprises a reaction chamber, the graphite support is arranged in the reaction chamber, and an epitaxial wafer is arranged on the graphite support; the two lifting platforms are symmetrically arranged on the left side and the right side of the reaction chamber and are used for lifting; the two lifting tables are a first lifting table and a second lifting table in sequence from left to right; the laser device is connected with the first lifting platform in a manner of swinging up and down and swinging back and forth, and the laser device is driven by a first swinging mechanism to swing up and down and swing back and forth; the detector is connected with the second lifting platform in a manner of swinging up and down and swinging back and forth, and the detector is driven by a second swinging mechanism to swing up and down and swing back and forth; and a control device. The MOCVD in-situ measur