Gas mixing cylinder device of CVD (Chemical Vapor Deposition) coating furnace
The utility model discloses a gas mixing cylinder device of a CVD (Chemical Vapor Deposition) coating furnace, which relates to the field of hard blade coating processing equipment and particularly comprises a cylinder body, an upper end cover and a lower end cover are detachably arranged on the cyl...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model discloses a gas mixing cylinder device of a CVD (Chemical Vapor Deposition) coating furnace, which relates to the field of hard blade coating processing equipment and particularly comprises a cylinder body, an upper end cover and a lower end cover are detachably arranged on the cylinder body in a sealing manner, a plurality of gas distribution plates are arranged in the cylinder body, a gas outlet is formed in the upper end cover, and a gas inlet is formed in the lower end cover; according to the gas mixing barrel, the upper end cover and the lower end cover are detachably arranged on the barrel body, the upper end cover is connected with the barrel body through bolts, so that the gas mixing barrel is convenient to disassemble, replace and observe internal conditions, and in addition, the problem that the gas mixing barrel cracks at high temperature is effectively solved through proper barrel body height and wall thickness.
本实用新型公布了一种CVD涂层炉混气筒装置,涉及硬质刀片涂层加工设备领域,具体包括筒体,筒体上可拆卸地密封设置有上端盖和下端盖,筒体内设 |
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