Silicon wafer feeding device

The utility model provides a silicon wafer feeding device which comprises a first base, a first lifting piece, a bearing platform, a first stop piece and a second stop piece, the first lifting piece is arranged on the first base, the bearing platform is arranged on the first lifting piece, the first...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	WU FEIFEI, ZHANG FUMING, HUANG ZHANGNAN, ZHU LIANG, XIE LONGHUI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	The utility model provides a silicon wafer feeding device which comprises a first base, a first lifting piece, a bearing platform, a first stop piece and a second stop piece, the first lifting piece is arranged on the first base, the bearing platform is arranged on the first lifting piece, the first stop piece is arranged on the first base, and the second stop piece is arranged on the second base. The bearing platform is arranged on the first base and can move in the first direction relative to the first base, first stopping pieces are arranged on the two sides of the bearing platform in the first direction respectively, second stopping pieces are arranged on the first base and can move in the second direction relative to the first base, and second stopping pieces are arranged on the two sides of the bearing platform in the second direction respectively. According to the silicon wafer feeding device, the first base is provided with the first stop piece and the second stop piece which are used for stopping the