Exhaust air speed measuring device for working cavity of gluing track

The utility model relates to an exhaust air speed measuring device for a working cavity of a gluing track, and belongs to the technical field of semiconductor equipment. Comprising an air exhaust conduction barrel, the air exhaust conduction barrel covers a gluing working cavity, and an air exhaust...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YANG HUI, CHENG QINGZHI, SHEN LONGHUA, GONG YUKE, GU JUNWEI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model relates to an exhaust air speed measuring device for a working cavity of a gluing track, and belongs to the technical field of semiconductor equipment. Comprising an air exhaust conduction barrel, the air exhaust conduction barrel covers a gluing working cavity, and an air exhaust opening is formed in the top of the gluing working cavity, so that the air exhaust conduction barrel is communicated with the gluing working cavity; and a wind speed tester is arranged on the air exhaust conduction barrel and is used for measuring the wind speed of wind gathered in the air exhaust conduction barrel and displaying a numerical value. A sealing ring is arranged at the bottom of the air exhaust conduction barrel, and the air exhaust conduction barrel is pressed downwards so that the sealing ring can be attached to a rubber disc opening. And handles are symmetrically arranged on the periphery of the exhaust conduction barrel. The exhaust air speed measuring device for the working cavity of the gluing tr