Infrared analysis and detection system for high-purity chlorosilane

The utility model discloses a high-purity chlorosilane infrared analysis and detection system which comprises a material pipe, one end of the material pipe is fixedly connected with a high-purity chlorosilane product tank, the upper part of the high-purity chlorosilane product tank is fixedly connec...

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Bibliographische Detailangaben
Hauptverfasser: HE SHOULIN, LUO QUANAN, LU MEIJIAO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model discloses a high-purity chlorosilane infrared analysis and detection system which comprises a material pipe, one end of the material pipe is fixedly connected with a high-purity chlorosilane product tank, the upper part of the high-purity chlorosilane product tank is fixedly connected with a tail gas pipe, and the tail gas pipe is communicated with the material pipe through a communicating pipe; one end of the nitrogen inlet pipe is fixedly connected with an analysis pipe through a material pipe, one end, far away from the nitrogen inlet pipe, of the analysis pipe is fixedly connected with an infrared instrument, and one side of the infrared instrument is fixedly connected with an analysis pool through an analysis liquid pipe; and the upper end of the tail gas residual liquid collecting tank is communicated with the infrared instrument through a tail gas residual liquid pipe. High-purity nitrogen enters the pipeline to generate pressure on the pipeline, so that the high-purity chlorosilane r