Ultrahigh vacuum low-temperature pump regeneration heating device

The utility model provides an ultrahigh vacuum cryopump regeneration heating device, and belongs to the technical field of vacuum cryopump regeneration. The device comprises a test platform and a heater body arranged on the test platform, a nitrogen cylinder is arranged in the test platform, an air channel is arranged in the heater body, an electric heating wire is arranged in the air channel, and a plug wire is arranged on the outer side wall of the heater body. An air inlet pipe and an air outlet pipe which are communicated with the inside of the air passage are respectively arranged on the outer side wall of the heater body; one end, far away from the heater body, of the air inlet pipe is connected with a nitrogen cylinder. An air inlet nozzle and an air outlet nozzle which are communicated with the interior of the air channel are fixedly arranged on the side wall of the heater body, and the air inlet pipe is fixedly connected to the air inlet nozzle and communicated with the interior of the air channel th