Quartz window heat preservation device, plasma reaction equipment and semiconductor processing machine table

The utility model provides a quartz window heat preservation device, plasma reaction equipment and semiconductor processing machine table, the quartz window heat preservation device comprises a cylinder body and a quartz window, the cylinder body comprises a first cavity and a second cavity from top...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JING QUAN, TANG JIEFENG, FU PENG, CHEN LIJUN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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