Wafer naked-eye detection tool

The utility model discloses a wafer naked eye detection tool, and relates to the wafer detection tool field, the wafer naked eye detection tool comprises a pedestal, the top of the pedestal is detachably connected with a packaging plate, the surface of the packaging plate is provided with a rotating...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HUANG XUAN, NI HUASHENG, WEI HU
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model discloses a wafer naked eye detection tool, and relates to the wafer detection tool field, the wafer naked eye detection tool comprises a pedestal, the top of the pedestal is detachably connected with a packaging plate, the surface of the packaging plate is provided with a rotating seat in a penetrating manner, the upper part of the rotating seat is connected with a butt joint disc through an adjusting rotating shaft; the butt-joint disc can adjust the size of an included angle formed between the butt-joint disc and the packaging plate, and a positioning structure is arranged behind the butt-joint disc. According to the utility model, the inclination angle of the wafer on the butt-joint disc can be accurately adjusted, synchronous rotation of the butt-joint disc and the wafer can be accurately controlled, a worker does not need to hold the wafer by hand for a long time, the wafer can be irradiated by a light source at different angles, damaged parts are exposed, and the work efficiency is im