Polycrystalline silicon reduction furnace electrode airtightness detection device

The utility model discloses an airtight detection device for an electrode of a polycrystalline silicon reduction furnace. The airtight detection device comprises a main body, a bottom mechanism and a connecting mechanism, wherein the connecting mechanism is fixedly arranged at the upper end of the m...

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Bibliographische Detailangaben
Hauptverfasser: LIU ZHAOBO, LIU YUSHAO, WANG JIE, MA WEIQING, LI XINGYUE, LEI YU, CAO DECAI, YANG FAN, HE PENG, SHAO KAIWEN, QIAO LIANG, CHEN WENKAI
Format: Patent
Sprache:chi ; eng
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