Polycrystalline silicon reduction furnace electrode airtightness detection device

The utility model discloses an airtight detection device for an electrode of a polycrystalline silicon reduction furnace. The airtight detection device comprises a main body, a bottom mechanism and a connecting mechanism, wherein the connecting mechanism is fixedly arranged at the upper end of the m...

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Bibliographische Detailangaben
Hauptverfasser: LIU ZHAOBO, LIU YUSHAO, WANG JIE, MA WEIQING, LI XINGYUE, LEI YU, CAO DECAI, YANG FAN, HE PENG, SHAO KAIWEN, QIAO LIANG, CHEN WENKAI
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The utility model discloses an airtight detection device for an electrode of a polycrystalline silicon reduction furnace. The airtight detection device comprises a main body, a bottom mechanism and a connecting mechanism, wherein the connecting mechanism is fixedly arranged at the upper end of the main body, and the bottom mechanism is fixedly arranged at the lower end of the main body; moreover, the bottom mechanism is in contact with an external polycrystalline silicon reduction furnace base, the main body covers an electrode of the polycrystalline silicon reduction furnace, and meanwhile, the connecting mechanism is externally connected with a positive pressure gas inlet pipeline or a negative pressure vacuumizing pipeline. According to the embodiment, the polycrystalline silicon reduction furnace electrode can be independently isolated and sealed, so that the purpose of independently carrying out airtight detection on the polycrystalline silicon reduction furnace electrode is achieved. 本实用新型公开了一种多晶硅还原炉电极气