Vacuum adsorption workbench
The utility model relates to a vacuum adsorption workbench, which belongs to the field of chip automatic processing, is mainly applied to enabling an adsorption area to be adaptive to a chip area, and comprises a shell base with a vacuum cavity and an air ventilation pipe arranged on the shell base...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model relates to a vacuum adsorption workbench, which belongs to the field of chip automatic processing, is mainly applied to enabling an adsorption area to be adaptive to a chip area, and comprises a shell base with a vacuum cavity and an air ventilation pipe arranged on the shell base and used for being communicated with a vacuum pump, and a plurality of through holes capable of being communicated with the vacuum cavity are formed in the shell base. Each through hole is connected with a pneumatic control valve which is selectively communicated with the vacuum cavity; the pneumatic control valve comprises an atmosphere positive pressure section communicated with the through hole, a vacuum negative pressure section communicated with the vacuum cavity and an elastic opening and closing piece arranged between the atmosphere positive pressure section and the vacuum negative pressure section. The diameter of the vacuum negative pressure section is smaller than that of the atmosphere positive pressure |
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