Crystal bar clamping tool

The utility model belongs to the field of semiconductor processing, and discloses a crystal bar clamping tool. Comprising a base, one end of the base is provided with a fixed baffle, the upper surface of the base is provided with a non-slip mat for placing a crystal bar, and the base is further prov...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHAN CHENCHEN, LIAO HEJIE, LIU HUOYANG, MA JINFENG, TANG LINFENG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model belongs to the field of semiconductor processing, and discloses a crystal bar clamping tool. Comprising a base, one end of the base is provided with a fixed baffle, the upper surface of the base is provided with a non-slip mat for placing a crystal bar, and the base is further provided with a fastening assembly for fixing the crystal bar on the non-slip mat; one end of the fixing baffle abuts against the end of the crystal bar, and the other end of the fixing baffle is provided with a fixing piece detachably fixed to machining equipment. The crystal bar clamping tool is simple in structure and convenient to operate, material loss of crystal bars can be reduced in the using process, and the cutting quality of the crystal bars is improved. 本实用新型属于半导体加工领域,公开了一种晶棒夹持工具。包括底座,所述底座的一端设置固定挡板,所述底座的上表面设置用于放置晶棒的防滑垫,所述底座上还设置将晶棒固定在防滑垫的紧固组件;所述固定挡板的一端抵接晶棒的端部,所述固定挡板的另一端设置与加工设备可拆卸固定的固定件。本实用新型的晶棒夹持工具结构简单,操作便捷,在使用过程中可降低晶棒的物料损耗,提高晶棒切割的质量。