Bearing device for wafer storage box

The utility model relates to the technical field of bearing devices, and discloses a bearing device for a wafer storage box, which comprises a bearing platform and a fixing piece, the bearing platform is provided with a bearing surface, and the bearing surface is used for bearing a wafer storage box...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ZHANG YE, FAN MINJUN, ZHAO XIAOBIN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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