Bearing device for wafer storage box

The utility model relates to the technical field of bearing devices, and discloses a bearing device for a wafer storage box, which comprises a bearing platform and a fixing piece, the bearing platform is provided with a bearing surface, and the bearing surface is used for bearing a wafer storage box...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHANG YE, FAN MINJUN, ZHAO XIAOBIN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The utility model relates to the technical field of bearing devices, and discloses a bearing device for a wafer storage box, which comprises a bearing platform and a fixing piece, the bearing platform is provided with a bearing surface, and the bearing surface is used for bearing a wafer storage box; the number of the fixing pieces is two, the fixing pieces are connected to the same side of the bearing platform, and the two fixing pieces are oppositely arranged in the first direction. According to the bearing device for the wafer storage box provided by the utility model, through the cooperative arrangement of the bearing platform and the fixing pieces, the pressure applied by the wafer storage box to the bearing platform is shared by the two fixing pieces in a combined manner, and compared with the manner that a single-side clamping surface bears all the pressure, the fixing pieces are stressed on the two sides, so that the fixing pieces are not prone to falling off. Therefore, deformation of the bearing pla